Metrology
North Cleanroom
1.728
Atomic Force Microscope
Tapping and Contact scan modes.
Pieces up to 6 inch wafer.
Suited for topological imaging of surfaces, with vertical resolution ranging from few microns down to sub nanometer scales
Website Undergoing Updates
We are in the process of redesigning our website. Some pages may be incomplete or outdated. Please bear with us during this transition.
© 2013 Microelectronics Research Center | Department of Electrical and Computer Engineering | The University of Texas at Austin