Diffusion
North Cleanroom
Tube #4 (the top one, in the rack closest from the cleanroom windows)
Brute Atmospheric Furnace, Piranha Clean Required (unless wafer is coming out of diffusion tube)
Compatible Materials:
Si / SiGe, Doping < 1x1018cm-3; N/N+ or P/P+, General purpose oxidation (wet or dry) and annealing.
Incompatible Materials:
Metals / Hi K / III-V / Photoresist
1. Log on to the tool using the LabAccess terminal.
2. Log off of the tool using the LabAccess terminal.
used by Julian Cheng's group for water steam production