Diffusion
North Cleanroom
1.756
Tube #5 (the middle one, in the rack closest from the cleanroom windows)
Brute Atmospheric Furnace, Piranha Clean Required (unless wafer is coming out of diffusion tube)
Compatible Materials:
Si / SiGe, Undoped wafers - Gate oxidation (wet or dry)
Incompatible Materials:
III-V / Hi K
1. Log on to the tool using the LabAccess terminal.
2. Log off of the tool using the LabAccess terminal.
Used by Tutuc's group once.