III-V Metals
North Cleanroom
1.748
4 pockets of 15cc (manual selection of the pocket)
Inficon Controller
5kW power supply
Cryo pumped (1h30min to reach 10-8 Torr)
Thickness monitoring in situ with Au crystal
Up to 3 4inch wafers clips on the flat rotating holder plate.
None
Compatible Materials:
For thick deposition and Au, Pt depostion
Incompatible Materials:
None