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Etcher ICP 2300 Exelan Flex LAM
Etcher ICP 2300 Exelan Flex LAM
Silicon Etch
North Cleanroom
1.750
LAM etcher with 12 gas lines is designed for use with 300 mm wafers. This equipment sustains the activities on nano-patterning transfer capability and specially block co-polymers, graphene and shaped nanostructures etching.
C4F8, CF4, O2, Ar, CO, CO2, O2, CHF3, HBr, N2, SF6, H2
Compatible Materials:
TBD