III-V Etch
North Cleanroom
1.750
Description: ICP Etcher
Features: 6 inch wafer load arm (for pieces, use carrier wafer)
HBr, Cl2, BCl3, CH4, SF6, and SiCl4
O2, Ar, N2, H2
Compatible Materials:
III-V
Incompatible Materials:
Metals
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Etcher ICP Oxford 100