Diffusion
North Cleanroom
1.756A
Rapid Thermal Process.
Features: Chuck Holder 4", Wafer Size up to 4".
N2 flow. Pyrometer
Process time:
450°C max 1 hour
900°C max 10 minutes
1000°C max 5 minutes
1100°C max 2 minutes
1150°C max 60 seconds
N2, NO (nitric oxide, nitrogen monoxide), NH3, O2
Compatible Materials:
Si
Incompatible Materials:
Metals
1.) Log on the Tool Using the LabAccess Termina