III-V Etch
North Cleanroom
1.750
Solvent Hood - Do NOT remove Labware from this tool!
Compatible Materials:
No Restrictions
1. Log on to the tool using the LabAccess terminal.
12. Log off of the tool using the LabAccess terminal.
© 2013 Microelectronics Research Center | Department of Electrical and Computer Engineering | The University of Texas at Austin