Website Undergoing Updates
We are in the process of redesigning our website. Some pages may be incomplete or outdated. Please bear with us during this transition.

You are here

Facilities » Equipment » North Cleanroom

Spin Rinse Dryer SAT (no PR. no Metal)

Diffusion
North Cleanroom
1.756

Semitool Spray Acid Tool, Piranha Clean Required

Compatible Materials: 
Si / SiGe
Incompatible Materials: 
Metals Photoresist
  1. Log on to the tool using the LabAccess terminal.
  2. Log off of the tool using the LabAccess terminal.