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Spin Rinse Dryer SAT (no PR. no Metal)

Diffusion
North Cleanroom
1.756

Semitool Spray Acid Tool, Piranha Clean Required

Compatible Materials: 
Si / SiGe
Incompatible Materials: 
Metals Photoresist
  1. Log on to the tool using the LabAccess terminal.
  2. Log off of the tool using the LabAccess terminal.