Diffusion
South Cleanroom
CIRCULAR VACUUM OVENS from T-M Vacuum Products, Inc.
Vacuum bake out and curing ovens capable of attaining temperatures up to 600C.
Standard pumping packages available from rough vacuum to ultra-high vacuum capabilities.
Touch screen PLC control systems and data logging capability.
Compatible Materials:
Si, metals
III-V,
Incompatible Materials:
Organics,
Polymers (photoresist)