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Spin Rinse Dryer SAT (no PR. no Metal)

Diffusion

North Cleanroom

1.756

Semitool Spray Acid Tool, Piranha Clean Required

Compatible Materials: 

Si / SiGe

Incompatible Materials: 

Metals Photoresist

1. Log on to the tool using the LabAccess terminal.
2. Log off of the tool using the LabAccess terminal.