Website Undergoing Updates
We are in the process of redesigning our website. Some pages may be incomplete or outdated. Please bear with us during this transition.

You are here

Facilities » Equipment » North Cleanroom

Solvent Hood - H03 (No Au)

Silicon Etch
North Cleanroom
1.738

Solvent hood
Do NOT remove Labware from this tool!

Compatible Materials: 
Si / SiGe
Incompatible Materials: 
III / V Au

1. Log on to the tool using the LabAccess terminal.
2. Log off of the tool using the LabAccess terminal.